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NTT Microsystem Integration Labs. | 論文
- Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures
- Anti-Sticking Effect of Organic Dielectric Formed by Electrodeposition in Microelectromechanical-System Structures
- Thick Au High-Q Inductor and Its Chip-on-Chip Bonding on an RF IC for Various Frequencies
- RF-MEMS Switch Structure for Low-Voltage Actuation and High-Density Integration
- Novel Structure and Fabrication Process for Integrated RF Microelectromechanical-System Technology
- Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices
- Integrated RF-MEMS Technology with Wafer-Level Encapsulation
- Thick-Dielectric Formation and MOSFET Reliability with Spin-Coating Film Transfer and Hot-Pressing Technique for Seamless Integration Technology
- A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing
- A New Fabrication Process for Low-Loss Millimeter-Wave Transmission Lines on Silicon
- Microfabrication Technology for Millimeter-Wave Photonic Systems on Si
- Monolithic Integration of a Silica-Based Arrayed Waveguide Grating Filter and Silicon Variable Optical Attenuators Based on p--i--n Carrier-Injection Structure
- Fast Optical Power Stabilization using a Germanium Photodiode and a Silicon Variable Optical Attenuator Integrated on a Silicon Photonic Platform
- Conformal Coating of Organic Dielectric Film on Gold Electrodes in Microelectromechanical System Devices by Electrodeposition
- Fast optical power stabilization using a germanium photodiode and a silicon variable optical attenuator integrated on a silicon photonic platform (レーザ・量子エレクトロニクス)
- Fast optical power stabilization using a germanium photodiode and a silicon variable optical attenuator integrated on a silicon photonic platform (光エレクトロニクス)
- Fast optical power stabilization using a germanium photodiode and a silicon variable optical attenuator integrated on a silicon photonic platform (フォトニックネットワーク)
- Low-loss Silicon Oxynitride Waveguides and Branches for the 850-nm-Wavelength Region
- Compact and Polarization-Independent Variable Optical Attenuator Based on a Silicon Wire Waveguide with a Carrier Injection Structure
- Surface Cleaning of Gold Structure by Annealing during Fabrication of Microelectromechanical System Devices