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Department Of Metallurgy And Materials Engineering Center For Electronic Materials And Components Ha | 論文
- Effect of a Guard-Ring on the Leakage Current in a Si-PIN X-Ray Detector for a Single Photon Counting Sensor
- Effect of a guard-ring on the leakage current in a Si-PIN x-ray detector for a single photon counting sensor (Electron devices: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
- Effect of a guard-ring on the leakage current in a Si-PIN x-ray detector for a single photon counting sensor (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
- Reaction of Ozone and H_2O_2 in NH_4OH Solutions and Their Reaction with Silicon Wafers
- Point of Use Regeneration of Oxide Chemical Mechanical Planarization Slurry by Filtrations
- Effect of Chemicals and Slurry Particles on Chemical Mechamical Polishing of Polyimide
- Particle Removal and Its Mechanism on Hydrophobic Silicon Wafer in Highly Diluted NH_4OH Solutions with an Added Surfactant : Semiconductors
- Effect of Organic Acids in Copper Chemical Mechanical Planarization Slurry on Slurry Stability and Particle Contamination on Copper Surfaces
- Passivation and Etching of Wafer Surfaces in HF-H_2O_2-WA Solutions
- The Hydrophilization of Process Wafers in Dilute Hydrogen Peroxide Solutions and Ozonated Deionized Water and Its Effects on Defects and Gate Oxide Integrity
- Damage Free Particle Removal from Extreme Ultraviolet Lithography Mask Layers by High Energy Laser Shock Wave Cleaning
- Reaction of Ozone and H2O2 in NH4OH Solutions and Their Reaction with Silicon Wafers
- The Effect of Hydrogen Peroxide on Frictional and Thermal Behaviors in a Citric Acid-Based Copper Chemical Mechanical Planarization Slurry
- Fabrication of Large-Area CoNi Mold for Nanoimprint Lithography
- Fabrication of Stainless Steel Mold Using Electrochemical Fabrication Method for Microfluidic Biochip
- Physical and Chemical Characterization of Reused Oxide Chemical Mechanical Planarization Slurry
- Effect of Corrosion Inhibitor, Benzotriazole, in Cu Slurry on Cu Polishing