Borucki Leonard | Araca, Inc.
スポンサーリンク
概要
関連著者
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Borucki Leonard
Araca, Inc.
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Zhuang Yun
Department Of Chemical And Environmental Engineering University Of Arizona
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PHILIPOSSIAN Ara
Department of Chemical and Environmental Engineering University of Arizona
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LEE Hyosang
Department of Chemical and Environmental Engineering, University of Arizona
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Sun Ting
Department Of Chemistry Northeastern University
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Ara Philipossian
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Theng Siannie
Araca, Inc., Tucson, AZ 85718, U.S.A.
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Philipossian Ara
University of Arizona
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Sampurno Yasa
University of Arizona
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Zhuang Yun
University of Arizona
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OHMI Tadahiro
New Industry Creation Hatchery Center, Tohoku University
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Zhuang Yun
Araca Inc.
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Cheng Jiang
Araca Inc.
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Sugawa Shigetoshi
Graduate School Of Engineering Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan
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Nemoto Takenao
New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan
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Gu Xun
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Nemoto Takenao
New Industry Creation Hatchery Center, Tohoku University
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Philipossian Ara
University of Arizona:Araca, Inc.
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Philipossian Ara
Araca, Inc., 2550 East River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Theng Sian
Araca, Inc.
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Mateo Ricardo
Araca, Inc.
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Leonard Borucki
Araca, Inc., Tucson, AZ 85718, U.S.A.
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Borucki Leonard
Araca, Inc., 2550 E. River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Borucki Leonard
Araca, Inc., 2550 East River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Nikita Naoki
Mitsubishi Materials Corporation, Iwaki, Fukushima 971-8184, Japan
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Kikuma Ryozo
Mitsubishi Materials Corporation, Iwaki, Fukushima 971-8184, Japan
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Meled Anand
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Sampurno Yasa
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Jiao Yubo
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Ting Sun
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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O'Moore Fergal
Novellus Systems, Inc., 4000 N. 1st St., San Jose, CA 95134, U.S.A.
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Zhuang Yun
University of Arizona:Araca, Inc.
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Yun Zhuang
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Zhuang Yun
Araca, Inc., 2550 East River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Gu Xun
Graduate School of Engineering, Tohoku University
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Joh Sooyun
Novellus Systems, Inc., 4000 N. 1st St., San Jose, CA 95134, U.S.A.
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Liao Xiaoyan
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Cheng Jiang
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Ashizawa Toranosuke
Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japan
著作論文
- Tribological study for low shear force CMP process on damascene interconnects (シリコン材料・デバイス)
- Theoretical and Experimental Investigation of Conditioner Design Factors on Tribology and Removal Rate in Copper Chemical Mechanical Planarization
- Characterization of Pad–Wafer Contact and Surface Topography in Chemical Mechanical Planarization Using Laser Confocal Microscopy
- Optical and Mechanical Characterization of Chemical Mechanical Planarization Pad Surfaces
- Analysis of Formation of Pad Stains in Copper Chemical Mechanical Planarization
- Effect of Pad Surface Micro-Texture on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization Process
- Analysis of A Novel Slurry Injection System in Chemical Mechanical Planarization