Theoretical and Experimental Investigation of Conditioner Design Factors on Tribology and Removal Rate in Copper Chemical Mechanical Planarization
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概要
- 論文の詳細を見る
Three theories connecting conditioning with material removal rates by the coefficient of friction are proposed and experimentally verified. The conditioning theory is employed to provide a specific prediction on how the number of active diamonds, cut rate, and cut furrow geometry affect pad surface abruptness. The same surface abruptness parameter was a factor in both the coefficient of friction and removal rate theories. The theory predicts a priori that friction and removal rate should decrease as the conditioned surface became less abrupt. Simple models of cut rate and active diamond count further indicate that abruptness should decrease with increasing conditioner load. Mitsubishi Materials Corporation conditioners with 60, 100, and 200 grit sizes are used to test the theory in an experiment in which conditioner load is varied from light to heavy. Polishing experiments and pad profilometry verified the main predictions of the theory.
- 2009-11-25
著者
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Zhuang Yun
Araca Inc.
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LEE Hyosang
Department of Chemical and Environmental Engineering, University of Arizona
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Philipossian Ara
Araca, Inc., 2550 East River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Borucki Leonard
Araca, Inc.
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Borucki Leonard
Araca, Inc., 2550 East River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Nikita Naoki
Mitsubishi Materials Corporation, Iwaki, Fukushima 971-8184, Japan
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Kikuma Ryozo
Mitsubishi Materials Corporation, Iwaki, Fukushima 971-8184, Japan
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Zhuang Yun
Araca, Inc., 2550 East River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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