LEE Hyosang | Department of Chemical and Environmental Engineering, University of Arizona
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概要
関連著者
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LEE Hyosang
Department of Chemical and Environmental Engineering, University of Arizona
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Zhuang Yun
Araca Inc.
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PHILIPOSSIAN Ara
Department of Chemical and Environmental Engineering University of Arizona
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Li Zhonglin
Department Of Chemical And Environmental Engineering University Of Arizona
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SEIKE Yoshiyuki
Asahi Sunac Corporation
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TAKAOKA Mineo
Asahi Sunac Corporation
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MIYACHI Keiji
Asahi Sunac Corporation
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Borucki Leonard
Araca, Inc.
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Zhuang Yun
Department Of Chemical And Environmental Engineering University Of Arizona
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Philipossian A
Univ. Arizona Az
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Philipossian Ara
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, U.S.A.
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Philipossian Ara
Araca, Inc., 2550 East River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Borucki Leonard
Araca, Inc., 2550 E. River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Borucki Leonard
Araca, Inc., 2550 East River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Nikita Naoki
Mitsubishi Materials Corporation, Iwaki, Fukushima 971-8184, Japan
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Kikuma Ryozo
Mitsubishi Materials Corporation, Iwaki, Fukushima 971-8184, Japan
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O'Moore Fergal
Novellus Systems, Inc., 4000 N. 1st St., San Jose, CA 95134, U.S.A.
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Takaoka Mineo
Asahi Sunac Corporation, 5050 Asahimae-cho, Owariasahi, Aichi 488-8688, Japan
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Zhuang Yun
Araca, Inc., 6655 North Canyon Crest Drive, Suite 1205, Tucson, Arizona 85750, U.S.A.
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Zhuang Yun
Araca, Inc., 2550 East River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Miyachi Keiji
Asahi Sunac Corporation, 5050 Asahimae-cho, Owariasahi, Aichi 488-8688, Japan
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Seike Yoshiyuki
Asahi Sunac Corporation, 5050 Asahimae-cho, Owariasahi, Aichi 488-8688, Japan
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Lee Hyosang
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, U.S.A.
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Joh Sooyun
Novellus Systems, Inc., 4000 N. 1st St., San Jose, CA 95134, U.S.A.
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Li Zhonglin
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, U.S.A.
著作論文
- Characterization of Slurry Residues in Pad Grooves for Diamond Disc and High Pressure Micro Jet Pad Conditioning Processes
- Theoretical and Experimental Investigation of Conditioner Design Factors on Tribology and Removal Rate in Copper Chemical Mechanical Planarization
- Analysis of Formation of Pad Stains in Copper Chemical Mechanical Planarization
- Characterization of Slurry Residues in Pad Grooves for Diamond Disc and High Pressure Micro Jet Pad Conditioning Processes