Philipossian A | Univ. Arizona Az
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概要
関連著者
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Philipossian A
Univ. Arizona Az
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PHILIPOSSIAN Ara
Department of Chemical and Environmental Engineering University of Arizona
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Zhuang Yun
Araca Inc.
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MITCHELL Erin
Department of Chemical and Environmental Engineering University of Arizona
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Li Zhonglin
Department Of Chemical And Environmental Engineering University Of Arizona
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SEIKE Yoshiyuki
Asahi Sunac Corporation
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MIYACHI Keiji
Asahi Sunac Corporation
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Philipossian Ara
University of Arizona
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Zhuang Yun
University of Arizona
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Olsen S
Univ. Arizona Arizona Usa
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OLSEN Scott
Department of Chemical and Environmental Engineering University of Arizona
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Philipossian Ara
The University Of Arizona Department Of Chemical And Environmental Engineering
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Mitchell E
Univ. Arizona Arizona Usa
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Uotani Nobuo
Showa Denko K. K.
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LEE Hyosang
Department of Chemical and Environmental Engineering, University of Arizona
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TAKAOKA Mineo
Asahi Sunac Corporation
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DENARDIS Darren
The University of Arizona, Department of Chemical and Environmental Engineering
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SUGIYAMA Masano
The University of Arizona, Department of Chemical and Environmental Engineering
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DOI Toshiro
The University of Arizona, Department of Chemical and Environmental Engineering
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LI Zhonglin
University of Arizona, Department of Chemical and Environmental Engineering
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SHIMAZU Yoshitomo
Showa Denko K. K.
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BORUCKI Leonard
Intelligent Planar
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Denardis Darren
The University Of Arizona Department Of Chemical And Environmental Engineering
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Doi Toshiro
The University Of Arizona Department Of Chemical And Environmental Engineering
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Li Zhonglin
University Of Arizona Department Of Chemical And Environmental Engineering
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Sugiyama Masano
The University Of Arizona Department Of Chemical And Environmental Engineering
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Philipossian Ara
University Of Arizona Department Of Chemical And Environmental Engineering
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DeNardia Darren
The University of Arizona, Department of Chemical and Environmental Engineering
著作論文
- Role of Slurry Flow Rate and Solids Content on Critical Tribological and Fluid Dynamics Attributes of ILD CMP
- Development and Analysis of a High-Pressure Micro Jet Pad Conditioning System for Interlayer Dielectric Chemical Mechanical Planarization
- Slurry Utilization Efficiency Studies in Chemical Mechanical Planarization
- Characterization of Slurry Residues in Pad Grooves for Diamond Disc and High Pressure Micro Jet Pad Conditioning Processes
- Experimental and Numerical Analysis of An Inhibitor-Containing Slurry for Copper Chemical Mechanical Planarization