Philipossian Ara | The University Of Arizona Department Of Chemical And Environmental Engineering
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概要
関連著者
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Philipossian Ara
The University Of Arizona Department Of Chemical And Environmental Engineering
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Denardis Darren
The University Of Arizona Department Of Chemical And Environmental Engineering
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Philipossian A
Univ. Arizona Az
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Sorooshian Jamshid
The University Of Arizona Department Of Chemical And Environmental Engineering
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SEIKE Yoshiyuki
Asahi Sunac Corporation
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MIYACHI Keiji
Asahi Sunac Corporation
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DENARDIS Darren
The University of Arizona, Department of Chemical and Environmental Engineering
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SUGIYAMA Masano
The University of Arizona, Department of Chemical and Environmental Engineering
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DOI Toshiro
The University of Arizona, Department of Chemical and Environmental Engineering
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Doi Toshiro
The University Of Arizona Department Of Chemical And Environmental Engineering
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Sugiyama Masano
The University Of Arizona Department Of Chemical And Environmental Engineering
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Philipossian Ara
The University of Arizona, Department of Chemical and Environmental Engineering, P.O. Box 210011, Tucson, AZ 85721, USA
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Habiro Masanobu
Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japan
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Rogers Chris
Tufts University, Department of Mechanical Engineering, 204 Anderson Hall, 200 College Ave., Medford, MA 02155, USA
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DeNardis Darren
The University of Arizona, Department of Chemical and Environmental Engineering, P.O. Box 210011, Tucson, AZ 85721, USA
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DeNardia Darren
The University of Arizona, Department of Chemical and Environmental Engineering
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Sorooshian Jamshid
The University of Arizona, Department of Chemical and Environmental Engineering, P.O. Box 210011, Tucson, AZ 85721, USA
著作論文
- Development and Analysis of a High-Pressure Micro Jet Pad Conditioning System for Interlayer Dielectric Chemical Mechanical Planarization
- Tribology and Removal Rate Characteristics of Abrasive-Free Slurries for Copper CMP Applications