PHILIPOSSIAN Ara | Department of Chemical and Environmental Engineering University of Arizona
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- 同名の論文著者
- Department of Chemical and Environmental Engineering University of Arizonaの論文著者
関連著者
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PHILIPOSSIAN Ara
Department of Chemical and Environmental Engineering University of Arizona
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Zhuang Yun
Department Of Chemical And Environmental Engineering University Of Arizona
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Zhuang Yun
Araca Inc.
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MITCHELL Erin
Department of Chemical and Environmental Engineering University of Arizona
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Philipossian A
Univ. Arizona Az
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LEE Hyosang
Department of Chemical and Environmental Engineering, University of Arizona
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Borucki Leonard
Araca, Inc.
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OLSEN Scott
Department of Chemical and Environmental Engineering University of Arizona
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Li Zhonglin
Department Of Chemical And Environmental Engineering University Of Arizona
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SEIKE Yoshiyuki
Asahi Sunac Corporation
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TAKAOKA Mineo
Asahi Sunac Corporation
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MIYACHI Keiji
Asahi Sunac Corporation
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Meled Anand
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Sampurno Yasa
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Theng Siannie
Araca, Inc., Tucson, AZ 85718, U.S.A.
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Jiao Yubo
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Olsen S
Univ. Arizona Arizona Usa
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Mitchell E
Univ. Arizona Arizona Usa
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Rogers C
Tufts Univ. Ma Usa
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Sorooshian Jamshid
Department Of Chemical And Environmental Engineering University Of Arizona
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Kido Takanori
Shiojiri Plant Ceramics Division Inorganic Sector Showa Denko K. K.
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ROGERS Chris
Department of Mechanical Engineering Tufts University
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LU Joseph
Department of Mechanical Engineering Tufts University
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King Deanna
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, USA
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King Deanna
Department Of Chemical And Environmental Engineering University Of Arizona
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Stein David
Sandia National Laboratories, Albuquerque, New Mexico 87114, USA
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Timon Robert
Sandia National Laboratories, Albuquerque, New Mexico 87114, USA
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Hetherington Dale
Sandia National Laboratories, Albuquerque, New Mexico 87114, USA
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Hetherington Dale
Sandia National Laboratories
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Stein David
Sandia National Laboratories
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Timon Robert
Sandia National Laboratories
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Rogers Chris
Department Of Crop Soil And Environmental Sciences University Of Arkansas
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Philipossian Ara
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, USA
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Philipossian Ara
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Philipossian Ara
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, U.S.A.
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Philipossian Ara
Department of Chemical and Environmental Engineering, The University of Arizona, Tucson, AZ 85721, U.S.A.
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Borucki Leonard
Araca, Inc., 2550 E. River Road, Suite 12204, Tucson, AZ 85718, U.S.A.
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Wei Xiaomin
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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O'Moore Fergal
Novellus Systems, Inc., 4000 N. 1st St., San Jose, CA 95134, U.S.A.
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Takaoka Mineo
Asahi Sunac Corporation, 5050 Asahimae-cho, Owariasahi, Aichi 488-8688, Japan
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Zhuang Yun
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Zhuang Yun
Araca, Inc., 6655 North Canyon Crest Drive, Suite 1205, Tucson, Arizona 85750, U.S.A.
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Miyachi Keiji
Asahi Sunac Corporation, 5050 Asahimae-cho, Owariasahi, Aichi 488-8688, Japan
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Seike Yoshiyuki
Asahi Sunac Corporation, 5050 Asahimae-cho, Owariasahi, Aichi 488-8688, Japan
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Mitchell Erin
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, USA
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Lee Hyosang
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, U.S.A.
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Joh Sooyun
Novellus Systems, Inc., 4000 N. 1st St., San Jose, CA 95134, U.S.A.
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Rosales-Yeomans Daniel
Department of Chemical and Environmental Engineering, The University of Arizona, Tucson, AZ 85721, U.S.A.
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Li Zhonglin
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, U.S.A.
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Liao Xiaoyan
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Cheng Jiang
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Ashizawa Toranosuke
Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japan
著作論文
- Role of Slurry Flow Rate and Solids Content on Critical Tribological and Fluid Dynamics Attributes of ILD CMP
- Slurry Utilization Efficiency Studies in Chemical Mechanical Planarization
- Characterization of Slurry Residues in Pad Grooves for Diamond Disc and High Pressure Micro Jet Pad Conditioning Processes
- TRIBOLOGY, FLUID DYNAMICS AND REMOVAL RATE CHARACTERIZATION OF NOVEL SLURRIES FOR ILD POLISH APPLICATIONS
- Frictional and Removal Rate Studies of Silicon Dioxide and Silicon Nitride CMP Using Novel Cerium Dioxide Abrasive Slurries
- Dependence of Oxide Pattern Density Variation on Motor Current Endpoint Detection during Shallow Trench Isolation Chemical Mechanical Planarization
- The Spectral Fingerprints and the Sounds of Chemical Mechanical Planarization Processes
- Analysis of Formation of Pad Stains in Copper Chemical Mechanical Planarization
- Slurry Utilization Efficiency Studies in Chemical Mechanical Planarization
- Effect of Pad Surface Micro-Texture on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization Process
- Tribological, Thermal, and Kinetic Characterization of 300-mm Copper Chemical Mechanical Planarization Process
- Analysis of A Novel Slurry Injection System in Chemical Mechanical Planarization
- Characterization of Slurry Residues in Pad Grooves for Diamond Disc and High Pressure Micro Jet Pad Conditioning Processes
- Fundamental Tribological and Removal Rate Studies of Inter-Layer Dielectric Chemical Mechanical Planarization