Liao Xiaoyan | Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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概要
- Liao Xiaoyanの詳細を見る
- 同名の論文著者
- Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.の論文著者
関連著者
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Liao Xiaoyan
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Zhuang Yun
Department Of Chemical And Environmental Engineering University Of Arizona
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PHILIPOSSIAN Ara
Department of Chemical and Environmental Engineering University of Arizona
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Borucki Leonard
Araca, Inc.
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Theng Siannie
Araca, Inc., Tucson, AZ 85718, U.S.A.
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Cheng Jiang
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, U.S.A.
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Ashizawa Toranosuke
Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japan
著作論文
- Effect of Pad Surface Micro-Texture on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization Process
- Effect of pad surface micro-texture on dishing and erosion during shallow trench isolation chemical mechanical planarization