Sato Shintaro | Fujitsu Laboratories Ltd.

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著作論文

Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition
Electrical properties of carbon nanotubes grown at a low temperature by radical chemical vapor deposition for future LSI interconnects
Carbon Nanotube Via Technologies for Advanced Interconnect Integration
Carbon nanotube technologies for future ULSI via interconnects
CNT-FETs with High Modulated Drain Current utilizing Size-classified Fe Particles as a Catalyst
Low-Temperature Synthesis of Graphene and Fabrication of Top-Gated Field Effect Transistors without Using Transfer Processes
Synthesis of a Closely Packed Carbon Nanotube Forest by a Multi-Step Growth Method Using Plasma-Based Chemical Vapor Deposition
High-Quality Carbon Nanotube Growth at Low Temperature by Pulse-Excited Remote Plasma Chemical Vapor Deposition
Self-organization of Novel Carbon Composite Structure : Graphene Multi-Layers Combined Perpendicularly with Aligned Carbon Nanotubes
Electrical Properties of Carbon Nanotube Bundles for Future Via Interconnects

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