YUUKI Akimasa | Central Research Laboratory, Mitsubishi Electric Corp.
スポンサーリンク
概要
関連著者
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MATSUI Yasuji
Central Research Laboratory, Mitsubishi Electric Corp.
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YUUKI Akimasa
Central Research Laboratory, Mitsubishi Electric Corp.
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Yuuki Akimasa
Central Research Laboratory Mitsubishi Electric Corp.
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Matsui Yasuji
Central Research Laboratory Mitsubishi Electric Corp.
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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Yuuki A
Semiconductor Research Laboratory Mitsubishi Electric Corporation
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Yuuki Akimasa
Product Development Laboratory Mitsubishi Electric Corporation
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橘 邦英
愛媛大学大学院工学研究科電子情報工学専攻
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Tachibana Kunihide
Department of Electronic Science and Engineering, Kyoto University
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Tachibana Kunihide
Department Of Electronic Science And Engineering Kyoto University
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Muto Y
The Institute For Materials Research Tohoku University
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Kawahara T
Semiconductor Leading Edge Technol. Inc. Tsukuba-shi Jpn
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KAWAHARA Takaaki
Central Research Laboratory, Mitsubishi Electric Corp.
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HARIMA Hiroshi
Department of Electronics and Information Science, Kyoto Institute of Technology
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Mukai T
Nitride Semiconductor Research Laboratory Opto-electronics Products Division Nichia Corp.
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Mukai Takashi
Department Of Research And Development; Nichia Chemical Industries Ltd.
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KAWAHARA Toshio
Department of Materials Science and Engineering, National Defense Academy
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YABE Hideki
Central Research Laboratory, Mitsubishi Electric Corporation
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Mukai Takashi
Nichia Corp. Tokushima Jpn
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MUKAI Takuya
Department of Electronics and Information Science, Kyoto Institute of Technology
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MORITA Noriko
Central Research Laboratory, Mitsubishi Electric Corp.
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Yabe Hideki
Central Research Laboratory Mitsubishi Electric Corp.
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Mukai Takuya
Department Of Electronics And Information Science Faculty Of Engineering And Desigh Kyoto Institute
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Harima H
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Harima Hiroshi
Department Of Applied Physics Osaha University
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Kawahara T
Faculty Of Technology Tokyo University Of Agriculture And Technology
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Morita Noriko
Central Research Laboratory Mitsubishi Electric Corp.
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YUUKI Akimasa
Central Research Laboratory, Mitsubishi Electric Corporation
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MATSUI Yasuji
Central Research Laboratory, Mitsubishi Electric Corporation
著作論文
- Spectroscopic Measurements of the Production and the Transport of CH Radicals in a Methane Plasma Used for the CVD of a-C:H
- On the Reaction Kinetics in a Mercury Photosensitized CVD of a-Si:H Films
- A Numerical Study on Gaseous Reactions in Silane Pyrolysis
- Reaction Mechanism of Chemical Vapor Deposition Using Tetraethylorthosilicate and Ozone at Atmospheric Pressure
- A Study on the Behavior of SiO_2 Film Precursors with Trench Deposition Method for SiH_4/O_2 Low Pressure Chemical Vapor Deposition
- Study of Surface Reaction Probability of CF_x Radicals by Trench Deposition Method