Tamura Takao | Ulsi Device Development Laboratories Nec Corp.

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著作論文

Recent Progress in Electron-Beam Cell Projection Techology
Coulomb Interaction Effect in Cell Projection Lithography
A 0.18-μm CMOS Hot-Standby PLL Using a Noise-Immune Adaptive-Gain VCO (Special Issue on Low-Power and High-Speed LSI Technologies)
Structural and Electrical Properties for Fluorine-Doped Silicon Oxide Films Prepared by Biased Helicon-Plasma Chemical Vapor Deposition
Structural and Electrical Properties for Fluorine-Doped Silicon Oxide Films Prepared by Biased Helicon-Plasma CVD
Characterization of Stable Fluorine-Doped Silicon Oxide Film Prepared by Biased Helicon Plasma Chemical Vapor Deposition
0.15 μm Electron Beam Direct Writing for Gbit Dynamic Random Access Memory Fabrication
Improved Proximity Effect Correction Technique Suitable for Cell Projection Electron Beam Direct Writing System
Electrical Equivalent Circuit of Loaded Thick Langevin Flexural Transducer
Derivation of a Force Factor Equation for a Langevin-Type Flexural Mode Transducer
0.15 µm Electron Beam Direct Writing for Gbit Dynamic Random Access Memory Fabrication

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