Oxynitride Formation Processes on Si(001) Studied by Means of Reflectance Difference Spectroscopy
スポンサーリンク
概要
著者
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Suzuki Takanori
Deparment Of Biological Science Graduate School Of Science Hiroshima University
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Ohno Shin-ya
Department Of Physics Faculty Of Engineering Yokohama National University
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Tanaka Masatoshi
Department Of Comprehensive Management Matsumoto University
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Ochiai Toshiyuki
Department of Physics, Faculty of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan
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Ochiai Toshiyuki
Department of Physics, Faculty of Engineering, Yokohama National University, Yokohama 240-8501, Japan
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Mitobe Fumitake
Department of Physics, Faculty of Engineering, Yokohama National University, Yokohama 240-8501, Japan
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