Impacts of amplitude modulation of RF discharge voltage on the growth of nanoparticles in reactive plasmas
スポンサーリンク
概要
著者
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Kamataki Kunihiro
Center For Research And Advancement In Higher Education Kyushu University
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Koga Kazunori
Department Of Electric And Electronics Graduate School Of Information Science And Electrical Enginee
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Miyata Hiroshi
Department Of Electric And Electronics Graduate School Of Information Science And Electrical Enginee
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