Elastic Stiffness of Co Thin Films at High Temperatures Monitored by Picosecond Ultrasound
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概要
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A picosecond ultrasound system for measuring the elastic stiffness of thin films at high temperatures is developed, and the elastic stiffness of Co films is measured up to 771 K during heating and cooling processes. The elastic stiffness of an as-deposited film is smaller than that of bulk Co. However, during heating, stiffening due to crystallization is observed, and in the cooling process, the elastic stiffness follows the temperature dependence of bulk Co. These results indicate that the as-deposited film is softer than the bulk and that once stiffening has occurred upon annealing, the Co thin film shows a similar elastic property to the bulk. The temperature dependence of acoustic attenuation is also discussed.
- 2013-07-25
著者
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Ogi Hirotsugu
Graduate School Of Engineering Science Osaka University
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Hirao Masahiko
Graduate School Of Engineering Sci. Osaka Univ.
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Nakamura Nobutomo
Graduate School Of Engineering Science Osaka University
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Nishiyama Masayoshi
Renovation Center of Instruments for Science Education and Technology, Osaka University, 1-2 Machikaneyama, Toyonaka, Osaka 560-0043, Japan
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Nakamichi Yohei
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
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