Fast Recovery of Elastic Stiffness in Ag Thin Film Studied by Resonant-Ultrasound Spectroscopy
スポンサーリンク
概要
- 論文の詳細を見る
We studied the recovery of the elastic constant of sputtered Ag films on monocrystal Si substrates by monitoring the resonance frequency of film/substrate specimens throughout the deposition process using resonant-ultrasound spectroscopy. An Ag film is deposited on a (001) Si substrate, which is located on the tripod transducer set in the sputtering chamber. The free-vibration resonance frequency of the Ag/Si specimen is measured before, during, and after the magnetron sputtering deposition, inducing the evolution of the elastic constants of the deposited film. Recovery of the elastic constants of the Ag film is completed within 40 min. The recovery behavior of the elastic constants is similar to that of residual stress; the recovery rate is comparable to that for residual stress.
- 2009-07-25
著者
-
Ogi Hirotsugu
Graduate School Of Engineering Science Osaka University
-
Hirao Masahiko
Graduate School Of Engineering Sci. Osaka Univ.
-
Nakamura Nobutomo
Graduate School Of Engineering Science Osaka University
-
Nishiyama Masayoshi
Renovation Center of Instruments for Science Education and Technology, Osaka University, 1-2 Machikaneyama, Toyonaka, Osaka 560-0043, Japan
-
Nakashima Takeo
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
-
Nakashima Takeo
Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan
関連論文
- Extraction of Interface Stiffness in Superlattices : Proposal of the Interface Elasticity Parameter
- Ultrasound-Induced Structural Anomaly of Supercooled Liquid in Some Bulk Metallic Glasses
- P1-1 Study on the Room-Temperature Aging of Cu Thin Films : Monitoring of Elasticity by Resonant-Ultrasound Spectroscopy(Poster session 1)
- OS6(5)-22(OS06W0137) Acoustic Spectroscopy for Measuring Anisotropic Elastic Constants of Thin Films
- Acoustic Study of Martensitic Phase Transformation in TiNbAl Shape Memory Alloy
- P2-43 Elastic and magnetic anisotropy in Co/Pt superlattices : Measurement by RUS/Laser method(Short presentation for poster)
- High-Frequency Electrodeless Quartz Crystal Microbalance Chip with a Bare Quartz Resonator Encapsulated in a Silicon Microchannel
- Elastic Constants of Single-Crystal Rare-Earth Bismuth Iron Garnet Films
- Fast Recovery of Elasticity of Cu Thin Films at Room Temperature Studied by Resonant-Ultrasound Spectroscopy
- Measurement of Elastic Constant and Refraction Index of Thin Films at Low Temperatures Using Picosecond Ultrasound
- P1-6 Excitation and Detection of Ultrasound Shear Wave by EMAR under High Pressure(Poster session 1)
- P1-8 Elastic Constants and Piezoelectric Coefficients of Langasite Single Crystal at Low Temperatures(Poster session 1)
- P2-30 Development of a high-sensitive electrodeless QCM immunosensor(Poster session 2)
- High Temperature Elastic Constants of α-Fe Single Crystal Studied by Electromagnetic Acoustic Resonance
- Label-Free Ultrathin Pt Film Biosensor Using Phonon Vibrations Excited by Ultrafast Light Pulses
- Fast Recovery of Elastic Stiffness in Ag Thin Film Studied by Resonant-Ultrasound Spectroscopy
- Detection of Glypican-3 Proteins for Hepatocellular Carcinoma Marker Using Wireless-Electrodeless Quartz-Crystal Microbalance
- Detection of shear horizontal guided waves propagating in aluminum plate with thinning region (Special issue: Ultrasonic electronics)
- Resonance Ultrasound Spectroscopy for Measuring Elastic Constants of Thin Films
- Pressure-Dependent Shear Modulus of Polycrystalline Al Studied by Electromagnetic Acoustic Resonance
- Development of 170 MHz Electrodeless Quartz-Crystal Microbalance Immunosensor with Nonspecifically Immobilized Receptor Proteins
- Resonant Ultrasound Microscopy with Isolated Langasite Oscillator for Quantitative Evaluation of Local Elastic Constant
- Noncontact Evaluation of Surface-Wave Nonlinearity for Creep Damage in Cr–Mo–V Steel
- Annealing Effect on Acoustic Property of Fe/Pt Superlattice Studied by Picosecond Ultrasound
- Monitoring of Longitudinal-Wave Velocity and Attenuation of SrTiO3 at Low Temperatures Using Picosecond Ultrasound Spectroscopy
- Picosecond Ultrasound Spectroscopy with a Stable Fiber Laser for Ultrahigh-Frequency-Oscillator Applications: from Nanomechanics to Biosensors
- Elastic Properties of Pd-Based Bulk Metallic Glasses Studied by Ultrasouond Spectroscopy
- Elastic-Constant Measurement in Oxide and Semiconductor Thin Films by Brillouin Oscillations Excited by Picosecond Ultrasound
- Aggregation Behavior of Amyloid $\beta_{1--42}$ Peptide Studied Using 55 MHz Wireless–Electrodeless Quartz Crystal Microbalance
- Elastic Constants and Magnetic Anisotropy of Co/Pt Superlattice: Resonance-Ultrasound-Spectroscopy Method
- Fabrication of Isolated FePd Nanoparticles by Sputtering and Heat Treatment
- Energy Trap for Axial-Shear-Wave Resonance in a Stepped Cylindrical Rod: Theory and Measurement
- Study of Elastic Anisotropy of Cu Thin Films by Resonant-Ultrasound Spectroscopy Coupled with Laser-Doppler Interferometry and Pump-Probe Photoacoustics
- Elastic Constants of Co/Pt Superlattice Studied by Acoustic Measurements and Ab initio Calculations
- Magnetic Phase Transition and Elastic Properties of $\alpha$-Mn at Low Temperature
- Increase of Efficiency of Magnetostriction SH-Wave Electromagnetic Acoustic Transducer by Angled Bias Field: Piezomagnetic Theory and Measurement
- High-Frequency Wireless and Electrodeless Quartz Crystal Microbalance Developed as Immunosensor
- Electromagnetic Acoustic Resonance to Assess Creep Damage in Cr–Mo–V Steel
- Effects of Dissolved and Ambient Gases on Sonochemical Degradation of Methylene Blue in High-Amplitude Resonant Mode
- Mechanisms of Ultrasonically Induced Fibrillation of Amyloid \beta_{1{\mbox{--}}40} Peptides
- Elastic Stiffness of Co Thin Films at High Temperatures Monitored by Picosecond Ultrasound
- Application of Sandwich Assay to Resonance Acoustic Microbalance with Naked-Embedded Quartz Biosensor for High-Selectivity Detection of C-Reactive Protein
- Mode Conversion and Total Reflection of Torsional Waves for Pipe Inspection
- Elastic Stiffness of Co Thin Films at High Temperatures Monitored by Picosecond Ultrasound (Special Issue : Ultrasonic Electronics) -- (Ultrasonic properties of materials, phonon physics, acousto-optics)