Laminated Capacitor Formed in Thermoplastic Resin Substrate by Laser-Assisted Micropowder Jet Implantation
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概要
- 論文の詳細を見る
A laminated capacitor has been formed in a poly(oxymethylene) substrate of the thermoplastic resin by a laser-assisted micro powder jet implantation method. A carbon powder and a BaTiO<inf>3</inf>powder were jetted for an electrode and a dielectric in turn with Ar gas while irradiating a Nd:YAG laser on the substrate, respectively. It was confirmed that the capacitance formed by this method was proportional to size of electrode areas and number of laminations. The dielectric constant estimated experimentally showed a large value of 5.2\times 10^{3}, which was probably enhanced by BaTiO<inf>3</inf>particles crushed to a particle size of approximately 150 nm through the jetting process. It was found that the capacitance showed an exponential dependence against the coming and going repetition number of times of powder jetting at formation of the dielectric layer, which is probably affected by both the increase in the thickness and the decrease in the dielectric constant according to the number of dielectric laminations.
- 2013-06-25
著者
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SUZUKI KATSUHIKO
Department of Hygiene, Hirosaki University School of Medicine
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Kuriyagawa Tsunemoto
Department Of Mechatronics And Precision Engineering Tohoku University
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Miura Kaichi
Miura Sensor Laboratory Corporation, Sendai 981-3203, Japan
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Ohuchi Takumi
Department of Materials Science and Engineering, Sendai National College of Technology, Natori, Miyagi 981-1239, Japan
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Kameya Shotaroh
Department of Production System Engineering, Sendai National College of Technology, Natori, Miyagi 981-1239, Japan
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Sugai Tohru
Department of Production System Engineering, Sendai National College of Technology, Natori, Miyagi 981-1239, Japan
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