Nondestructive measurement of machining-induced amorphous layers in single-crystal silicon by laser micro-Raman spectroscopy
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概要
- 論文の詳細を見る
- 2008-07-01
著者
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Yan Jiwang
Department Of Mechanical Engineering Faculty Of Engineering Kitami Institute Of Technology
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Kuriyagawa Tsunemoto
Department Of Mechatronics And Precision Engineering Tohoku University
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Yan Jiwang
Department Of Nanomechanics School Of Engineering Tohoku University
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ASAMI Tooru
Department of Nanomechanics, School of Engineering, Tohoku University
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Asami Tooru
Department Of Nanomechanics School Of Engineering Tohoku University
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KURIYAGAWA Tsunemoto
Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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