C25 Optimization of Grinding Conditions Utilizing Nano-topography Distribution Analysis(Ultra-precision machining)
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概要
- 論文の詳細を見る
Recently, optical parts are required to be high precision. And the form accuracy becomes under 50nm. The form error, which distributes periodically on ground surface, is named nano-topography. Because the distribution of the nano-topography changes in a poorly-repeatable manner, it is quite difficult to compensate. From previous study, relationship between spatial frequency of the nano-topography and grinding conditions is investigated. And it is found that the spatial frequency of the nano-topography can be controlled by the grinding conditions. In this paper, actual grinding condition is estimated by the distribution of nano-topography. And the grinding condition is compensated so that to optimize the distribution of nano-topography.
- 一般社団法人日本機械学会の論文
- 2009-12-01
著者
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KURIYAGAWA Tsunemoto
Tohoku University
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YAN Jiwang
Tohoku University, Graduate School of Engineering, Dept. of Nanomechanics
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Yan Jiwang
Tohoku University
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Kuriyagawa Tsunemoto
Tohoku Univ.
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YOSHIHARA Nobuhito
Tohoku University
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yoshihara Nobuhiro
Department of Nanomechanics, Tohoku University
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KURIYAGAWA Tsunemoto
Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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