Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining
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概要
- 論文の詳細を見る
- 2009-10-01
著者
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Yan Jiwang
Department Of Mechanical Engineering Faculty Of Engineering Kitami Institute Of Technology
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Kuriyagawa Tsunemoto
Department Of Mechatronics And Precision Engineering Tohoku University
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Yan Jiwang
Department Of Nanomechanics School Of Engineering Tohoku University
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Harada Hirofumi
Siltronic Japan Corporation
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ASAMI Tooru
Department of Nanomechanics, School of Engineering, Tohoku University
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Asami Tooru
Department Of Nanomechanics School Of Engineering Tohoku University
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KURIYAGAWA Tsunemoto
Department of Nanomechanics, Graduate School of Engineering, Tohoku University
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- Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining
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