Powder Jet Deposition of Ceramic Films(M^4 processes and micro-manufacturing for science)
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概要
- 論文の詳細を見る
Ceramic films are needed in micro-electro-mechanical systems as insulating, piezoelectric and ferroelectric materials. The required film thickness is 1-10μm. This is too thin to machine by polishing or grinding, and too thick to grow by chemical or physical vapor deposition. The present study proposes a new method called powder jet deposition (PJD) for fabricating ceramic films 1-10μm in thickness. Indentation and scratching tests are performed on ceramic films deposited by the PJD method. It is found that the hardness of the films depends on PJD conditions.
- 一般社団法人日本機械学会の論文
- 2005-10-18
著者
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OGAWA Kazuhiro
Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University
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KURIYAGAWA Tsunemoto
Department of Mechatronics and Precision Engineering, Tohoku University
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Ogawa Kazuhiro
Fracture And Reliability Research Institute Tohoku University
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Kuriyagawa Tsunemoto
Department Of Nanomechanics Tohoku University
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Kuriyagawa Tsunemoto
Department Of Mechatronics And Precision Engineering Tohoku University
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YOSHIHARA Nobuhito
Department of Nanomechanics, Tohoku University
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YASUTOMI Yuya
Department of Nanomechanics, Tohoku University
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Yasutomi Yuya
Department Of Nanomechanics Tohoku University
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Yoshihara Nobuhito
Department Of Nanomechanics Tohoku University
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Yoshihara Nobuhito
Department Of Mechatronics And Precision Engineering Tohoku University
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