1.3-μm Quantum Dot Distributed Feedback Laser with Half-Etched Mesa Vertical Grating Fabricated by Cl
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概要
- 論文の詳細を見る
We propose a quantum dot (QD) laser with the half-etched mesa distributed feedback (HEM DFB) structure fabricated by single-step dry etching. The HEM DFB structure provides several advantages, such as low scattering loss and wavelength stability. In this study, we demonstrated a low threshold current of 23 mA and a high thermal stability of 0.077 nm/K for 1.3 μm ground state emission. We also improved the performance of the slope efficiency of HEM DFB lasers by using Cl<inf>2</inf>dry etching.
- 2013-06-25
著者
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Komori Kazuhiro
National Institute Of Advanced Industrial Science And Technology (aist)
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SUGAYA Takeyoshi
National Institute of Advanced Industrial Science and Technology
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YAMADA Jun
Aichi Institute of Technology
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Amano Takeru
National Institute Of Advanced Industrial Science And Technology (aist)
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Goshima Keishiro
Aichi Institute of Technology (AIT), Toyota, Aichi 470-0392, Japan
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Tsuda Norio
Aichi Institute of Technology (AIT), Toyota, Aichi 470-0392, Japan
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