Effect of In2O3 Underlayer on Crystallinity of Hexagonal InN and InGaN Thin Films Grown on c-Face Sapphire Substrates
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概要
- 論文の詳細を見る
In2O3 thin films were applied as underlayers for the growth of hexagonal InN and InGaN thin films on sapphire c-face substrates. Crystallinities of the nitride thin films grown with and without the In2O3 underlayer were compared, and the effect of the underlayer on these crystallinities was investigated. The application of (111)-faced heteroepitaxial In2O3 underlayers brought clear improvement effects on the crystallinities. In2O3 can be added to one of the promising underlayer materials for the hexagonal nitride thin film growth on the c-face sapphire substrate in addition to the typical nitride buffer layer materials, such as GaN and AlN.
- The Japan Society of Applied Physicsの論文
- 2011-10-25
著者
-
Ito Kazuki
Department Of Cardiology Inuyama Chuuou Hospital
-
Sato Yuichi
Department Of Applied Chemistry Faculty Of Engineering Kanagawa University
-
Ito Kazuki
Department of Electrical and Electronic Engineering, Graduate School of Engineering and Resource Science, Akita University, Akita 010-8502, Japan
-
Sato Yuichi
Department of Electrical and Electronic Engineering, Graduate School of Engineering and Resource Science, Akita University, Akita 010-8502, Japan
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