Electrical Properties of Ni-Cr-N Thin Films Deposited by Multitarget Reactive Sputtering : Surfaces, Interfaces, and Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-08-15
著者
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Sato Yuichi
Department of Imaging, Health Park Clinic Kurosawa
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SATO Susumu
Department of Electrical and Electronic Engineering, Akita University
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Sato Yuichi
Department Of Imaging Health Park Clinic Kurosawa
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Watanabe Masaya
Department Of Electrical And Electronic Engineering Faculty Of Engineering And Resource Science Akit
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Sato Y
Toshiba Corp. Kawasaki Jpn
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Sato Susumu
Department Of Electrical And Electronic Engineering Akita University
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Watanabe Masaya
Department Of Cardiovascular Medicine Hokkaido University Graduate School Of Medicine
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Sato Yuichi
Department Of Applied Chemistry Faculty Of Engineering Kanagawa University
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