ZnO Thin Films Grown on Porous Silicon by Plasma-Assisted Molecular Beam Epitaxy
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概要
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ZnO thin films were grown on porous silicon by plasma-assisted molecular beam epitaxy. Thermal annealing was then carried out at various temperatures in the range from 500 to 700 °C for 10 min. Atomic force microscopy, scanning electron microscopy, X-ray diffraction, and photoluminescence were carried out to investigate the effects of the annealing temperature on the properties of the ZnO thin films. The ZnO thin films exhibit a mountain-range-like surface. With increasing annealing temperature, the grain size increased and the residual stress decreased. The activation energy of the free exciton (FX) emission from the ZnO thin films was found to be about 32 meV and the fitting parameters in Varshni's empirical equation were \alpha = 2\times 10^{-3} eV/K and \beta = 1200 K. The photoluminescence (PL) intensity ratio of near-band-edge emission to deep-level emission of the ZnO thin films increased with increasing annealing temperature.
- 2012-03-25
著者
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Kim Min
Department Of Chemical Engineering Cheju National University
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Leem Jae-Young
Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, Gimhae 621-749, Republic of Korea
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Nam Giwoong
Department of Nano Engineering, Inje University, Gimhae, Gyeongnam 621-749, Republic of Korea
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Kim Soaram
Department of Nano Engineering, Inje University, Gimhae, Gyeongnam 621-749, Republic of Korea
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Kim Do
Holcombe Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Clemson, SC 29634, U.S.A.
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Kim Sung-O
Holcombe Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Clemson, SC 29634, U.S.A.
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Lee Dong-Yul
Epi R&D team, Samsung LED Co., Ltd., Suwon, Gyeonggi 443-373, Republic of Korea
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Yim Kwang
Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, Gimhae 621-749, Republic of Korea
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Yim Kwang
Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, Gimhae, Gyungnam 621-749, Republic of Korea
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Kim Soaram
Department of Nano Engineering, Inje University, Gimhae, Gyungnam 621-749, Republic of Korea
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Kim Min
Department of Applied Science, Korea Maritime University, Busan 606-791, Korea
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Kim Min
Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, Gimhae, Gyungnam 621-749, Republic of Korea
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KIM Min
Department of Animal Science and Biotechnology, College of Agriculture and Life Science, Chungnam National University, Daejeon 305–764, Korea
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