Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method
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概要
- 論文の詳細を見る
In environmental assessment and security, it is necessary to detect hazardous gases at low concentrations. The ball surface acoustic wave (SAW) sensor can have significantly improved sensitivity when the ultramultiple roundtrips (e.g., ${>}100$ turns) of the SAW is achieved. However, it is hindered by the thick and coarse organic sensitive film fabricated by the conventional spin-coating method. We propose an "off-axis spin coating method" in order to fabricate thin and highly uniform organic sensitive film with high reproducibility. Langasite ball SAW sensors were coated by polyisoprene, polyisobutylene, and polydimethylsiloxane sensitive films and were applied in detecting normal saturated hydrocarbons (pentane, hexane, heptane, octane, and nonane), a nerve gas simulant (dimethyl methylphosphonate: DMMP), and sick-house gases (benzene, toluene, and xylene). With the proposed method, we succeeded in realizing multiple roundtrips and in detecting DMMP at a sub-ppm concentration without preliminary condensation of the sample.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-07-25
著者
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Tsuji Toshihiro
Department Of Environmental Technology And Urban Planning Nagoya Institute Of Technology
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Yamanaka Kazushi
Department Of Applied Physics Faculty Of Engineering University Of Tokyo:(present Address)mechanical
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Yamamoto Yutaro
Department of Materials Processing, Tohoku University, Sendai 980-8579, Japan
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Sakuma Masanori
Department of Materials Processing, Tohoku University, Sendai 980-8579, Japan
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Kobari Kentaro
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Akao Shingo
Department of Materials Processing, Tohoku University, Sendai 980-8579, Japan
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