Measurement of Surface Acoustic Wave on a Quartz Ball with Proximate Electrodes to Improve Performance of Ball Surface Acoustic Wave Device
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概要
- 論文の詳細を見る
In order to improve the performance of ball surface acoustic wave (SAW) devices, we have developed an orientation control apparatus to find the $Z$ axis of a quartz crystal ball by an optical birefringence measurement, and to find the $X$ and $Y$ axes by measuring the propagation characteristics of a SAW using an interdigital transducer (IDT), which is moved close to the ball using a translation stage. The soft spring of the vacuum chuck of the ball manipulator prevented damage to the ball or IDT during the contact. The concave shape of the ball holder of the chuck enabled repeatable alignment of the ball center and the manipulator axis. As a preliminary result, we confirmed that the SAW velocity variation had 60° periodicity and succeeded in identifying the $-Y$ axis-equivalent direction on the quartz ball.
- 2007-07-30
著者
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Kai Satoshi
Department Of Agricultural And Resource Economics Faculty Of Agriculture Kyushu University
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Mihara Tsuyoshi
Department Of Materials Processing Graduate School Of Engineering Tohoku University
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Ohgi Tsuneo
Toppan Printing Co. Ltd.
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Satoh Ichitaro
Yamatake Corp.
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Fukiura Takeshi
Yamatake Co.
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Tanaka Hidekazu
Yamatake Corp.
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Nakaso Noritaka
Toppan Printing Co.
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Yamanaka Kazushi
Department Of Applied Physics Faculty Of Engineering University Of Tokyo:(present Address)mechanical
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Mihara Tsuyoshi
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai, 980-8579, Japan
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Ote Kazunori
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Fukiura Takeshi
Yamatake Corporation, Fujisawa, Kanagawa 251-8522, Japan
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Yamanaka Kazushi
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai, 980-8579, Japan
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Ote Kazunori
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai, 980-8579, Japan
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Tanaka Hidekazu
Yamatake Corporation, Fujisawa, Kanagawa 251-8522, Japan
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