Evaluation of Response Time in Ball Surface-Acoustic-Wave Hydrogen Sensor using Digital Quadrature Detector
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概要
- 論文の詳細を見る
Hydrogen leak detection sensors must have high sensitivity and a short response time of 1 s or less. A ball surface-acoustic-wave (SAW) hydrogen sensor has a high sensitivity and can detect hydrogen in a very wide concentration range of 10 ppm to 100%. Moreover, a fast response can be expected because of the very thin sensitive film used. In this study, we developed a digital quadrature detector (DQD) to measure responses of less than 1 s, and measure phases in 1 ms intervals with excellent sensitivity. We evaluated the response time of the ball SAW hydrogen sensor where the signal was averaged 256 times in 0.256 s using the DQD. As a result, the response time was found to be 1 s or less for 3.0 vol % hydrogen gas in nitrogen.
- 2007-07-30
著者
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Sim Dongyoun
Ball Semiconductor Inc.
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Mihara Tsuyoshi
Department Of Materials Processing Graduate School Of Engineering Tohoku University
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Iwata Naoya
Department Of Biotechnology School Of Engineering Nagoya University
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Tsuji Toshihiro
Department Of Environmental Technology And Urban Planning Nagoya Institute Of Technology
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Ebi Yusuke
Yamatake Corp. Kanagawa Jpn
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Fukiura Takeshi
Yamatake Co.
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Noguchi Kazuhiro
Toppan Printing Co. Ltd.
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Tanaka Hidekazu
Yamatake Corp.
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Nakaso Noritaka
Toppan Printing Co.
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Akao Shingo
Toppan Printing Co. Ltd.
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Yamanaka Kazushi
Department Of Applied Physics Faculty Of Engineering University Of Tokyo:(present Address)mechanical
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Iwata Naoya
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Abe Takuji
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Akao Shingo
Toppan Printing Co., Ltd., Sugito, Saitama 345-8508, Japan
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Sim Dongyoun
Ball Semiconductor Inc., Allen, TX 75013, U.S.A.
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