Development of High Precision Metal Micro-Electro-Mechanical-Systems Column for Portable Surface Acoustic Wave Gas Chromatograph (Special Issue : Ultrasonic Electronics)
スポンサーリンク
概要
著者
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Tsuji Toshihiro
Department Of Environmental Technology And Urban Planning Nagoya Institute Of Technology
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Sakamoto Toshihiro
Department Of Earth And Planetary Science Graduate School Of Science The University Of Tokyo
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Yamanaka Kazushi
Department Of Applied Physics Faculty Of Engineering University Of Tokyo:(present Address)mechanical
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Nakaso Noritaka
Department of Materials Processing, Tohoku University, Sendai 980-8579, Japan
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Akao Shingo
Department of Materials Processing, Tohoku University, Sendai 980-8579, Japan
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Iwaya Takamitsu
Department of Materials Processing, Tohoku University, Sendai 980-8579, Japan
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