Evaluation of Functional Materials and Devices Using Atomic Force Microscopy with Ultrasonic Measurements
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概要
- 論文の詳細を見る
Modern functional materials and devices require thorough testing for safety and reliability. Here, we describe solutions to meet this requirement in the field of scanning probe microscopy, and the most practical approach among them; ultrasonic atomic force microscopy (UAFM). In this review, we focus on evaluation of subsurface defects with scientific and technological importance, such as domains of ferroelectric materials and subsurface delamination of metal electrodes on microdevices. In addition, we show the development and application of the lateral bending (LB) mode and lateral modulation atomic force microscopy (LM-AFM) with applications in nanomaterials including carbon nanotube composites and discuss their future development in combination with UAFM.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-07-25
著者
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Tsuji Toshihiro
Department Of Environmental Technology And Urban Planning Nagoya Institute Of Technology
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Yamanaka Kazushi
Department Of Applied Physics Faculty Of Engineering University Of Tokyo:(present Address)mechanical
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Kobari Kentaro
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Yamanaka Kazushi
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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