Development of Packed Column for Surface Acoustic Wave Gas Chromatograph Using Anodically Bonded Silicon–Glass Structure with a Compression Jacket
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概要
- 論文の詳細を見る
Gas or liquid chromatographs (GC/LCs) are frequently used for multiple-compound sensing, but they are too large and heavy to be portable. To provide a handy GC/LC, many groups have proposed micro GC/LCs in which large columns are replaced by small micro-electro-mechanical-system (MEMS) columns. However, because of the high packing pressure, a packed MEMS column using an anodically bonded structure has not been realized so far. In this study, we realized such a MEMS column for the first time by introducing a compression jacket to reduce the tensile stress at the silicon–glass boundary. Consequently we succeeded in the separation and detection of lower hydrocarbons using a ball surface acoustic wave sensor.
- 2009-07-25
著者
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Tsuji Toshihiro
Department Of Environmental Technology And Urban Planning Nagoya Institute Of Technology
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Yamanaka Kazushi
Department Of Applied Physics Faculty Of Engineering University Of Tokyo:(present Address)mechanical
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Yamamoto Yutaro
Department of Materials Processing, Tohoku University, Sendai 980-8579, Japan
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Sakuma Masanori
Department of Materials Processing, Tohoku University, Sendai 980-8579, Japan
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Nakaso Noritaka
JST, CREST, Chiyoda, Tokyo 102-0075, Japan
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Kobari Kentaro
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Akao Shingo
Department of Materials Processing, Tohoku University, Sendai 980-8579, Japan
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Noguchi Kazuhiro
JST, CREST, Chiyoda, Tokyo 102-0075, Japan
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