Temperature Compensation for Ball Surface Acoustic Wave Devices and Sensor Using Frequency Dispersion
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概要
- 論文の詳細を見る
We propose a new temperature compensation method for ball surface acoustic wave (SAW) devices using frequency dispersion. This method distinguishes the temperature effect independent of frequency and surface effects such as mass loading or elastic effects linearly dependent on frequency. After stating the principle of the method, we verify it by fabricating ball SAW devices with an interdigital transducer (IDT) that works at two frequencies, and apply them to the measurement of the coating of albumin on the surface of the device and on a hydrogen gas sensor with a surface-coated sensing film. Delay time measurements are carried out at two frequencies, and the difference in delay time is calculated to eliminate temperature-independent effects. Because the results clearly show surface effects without temperature disturbance, it is a difficult to realize sensors using ball SAW devices.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-05-30
著者
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Ohgi Tsuneo
Toppan Printing Co. Ltd.
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Nakaso Noritaka
Toppan Printing Co.
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Akao Shingo
Toppan Printing Co. Ltd.
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Yamanaka Kazushi
Department Of Applied Physics Faculty Of Engineering University Of Tokyo:(present Address)mechanical
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Abe Takuji
Department of Materials Processing, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Nakaso Noritaka
Toppan Printing Co., Ltd., 4-2-3 Takanodaiminami, Sugito-machi, Kitakatsushika-gun, Saitama 345-8508, Japan
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Nakatsukasa Takuya
Toppan Printing Co., Ltd., 4-2-3 Takanodaiminami, Sugito-machi, Kitakatsushika-gun, Saitama 345-8508, Japan
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Yamanaka Kazushi
Department of Materials Processing, Tohoku University, Aoba 02, Sendai 980-8579, Japan
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Ohgi Tsuneo
Toppan Printing Co., Ltd., 4-2-3 Takanodaiminami, Sugito-machi, Kitakatsushika-gun, Saitama 345-8508, Japan
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Akao Shingo
Toppan Printing Co., Ltd., 4-2-3 Takanodaiminami, Sugito-machi, Kitakatsushika-gun, Saitama 345-8508, Japan
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