One-Millimeter Diameter Harmonic Ball Surface Acoustic Wave Gas Sensor with Temperature Compensation by Itself
スポンサーリンク
概要
- 論文の詳細を見る
A newly designed 1-mm diameter harmonic ball surface acoustic wave (SAW) gas sensor has a double-electrode interdigital transducer (IDT) for driving multiple frequencies. The fundamental frequency is 80 MHz. The difference in delay time between a fundamental frequency component and a high harmonics was used to compensate temperature drift. A temperature coefficient of about 0.1 ppm/°C was obtained after compensation.
- 2008-05-25
著者
-
Sim Dongyoun
Ball Semiconductor Inc.
-
Iwata Naoya
Department Of Biotechnology School Of Engineering Nagoya University
-
Tsuji Toshihiro
Department Of Environmental Technology And Urban Planning Nagoya Institute Of Technology
-
TAKEDA Nobuo
Ball Semiconductor Inc.
-
Nakaso Noritaka
Toppan Printing Co.
-
Yamanaka Kazushi
Department Of Applied Physics Faculty Of Engineering University Of Tokyo:(present Address)mechanical
-
Takeda Nobuo
Ball Semiconductor Inc., Century Parkway Allen, TX 75013, U.S.A.
-
Iwata Naoya
Department of Materials Processing, Tohoku University, Sendai 980-8579, Japan
-
Maxey Bryan
Ball Semiconductor Inc., Century Parkway Allen, TX 75013, U.S.A.
関連論文
- Principle and application of ball surface acoustic wave (SAW) sensor(Commemoration of the Japan-China Joint Conference on Acoustics 2007 (JCA2007))
- Initial Condition and Calculation Method for the Numerical Simulation of LPE
- Simulation of Compositional Variation in Liquid Phase Epitaxy InGaP Using a Two Dimensional Model
- Development of Nonlinear Ultrasonic Phased Array for Evaluating Closed Cracks
- Proposal of Reliability Index in Search for Reliable Solutions of Reverse Calculation Based on Fuzzy Neural Network Modeling
- New Instrument for Rapid and Accurate Measurement of Ultrasonic Velocity and Attenuation Using a Minicomputer System
- P1-29 Evaluation of response time in ball surface acoustic wave hydrogen sensor(Poster session 1)
- P1-28 Measurement of SAW on a quartz ball with proximate electrodes to improve waveforms of ball SAW device(Poster session 1)
- P2-17 Effect of temperature on the response of ball SAW hydrogen gas sensor(Short oral presentation for posters)
- Electrostatically Levitated Ball MEMS
- Development of Multiple-Gas Analysis Method Using the Ball Surface Acoustic Wave Sensor
- Evaluation of Acoustic Anisotropy to Image Defects in Weld Metal by Ultrasonic Phased Array
- Evaluation of Response Time in Ball Surface-Acoustic-Wave Hydrogen Sensor using Digital Quadrature Detector
- Characteristic Evaluation of Lenses for Ultrasonic Micro-Spectrometer
- Evaluation of Adhesion of Films by V(z) Curve Method : Ultrasonic Imaging and Microscopy
- Ultrasonic Excitation by Phase Velocity Scanning of Laser Beam and Application to Nondestructive Evaluation (Short Note)
- C302 RETRANSITION FROM TURBULENCE TO LAMINAR FLOW IN A COMBINED-CONVECTION BOUNDARY LAYER ALONG A VERTICAL HEATED PLATE(Mixed convection)
- EXPERIMENTALLY PRODUCED CHRONIC THROMBOEMBOLIC PULMONARY HYPERTENSION IN DOGS WITH PEFERENCE TO THE MORPHOLOGIC COMPARISONS WITH PRIMARY PULMONARY HYPERTENSHION
- Floating Resonance Method for Precise Evaluation of Bearing Balls
- Floating Free Resonance Method for Precise Evaluation of Bearing Balls(NDE3)
- Surface Acoustic Waves on a Sphere —Analysis of Propagation Using Laser Ultrasonics—
- Observation of Dislocation Behavior in Graphite by Using Ultrasonic Atomic Force Microscopy(Special Issue on strength and Fracture, and Experimental Mechanics)
- Observation of Anomalous Dislocation Behavior in Graphite Using Ultrasonic Atomic Force Microscopy
- Observation of Dislocation Behavior in Graphite by Using Ultrasonic Atomic Force Microscopy(NDE3)
- Development of Packed Column for Surface Acoustic Wave Gas Chromatograph Using Anodically Bonded Silicon–Glass Structure with a Compression Jacket
- One-Millimeter Diameter Harmonic Ball Surface Acoustic Wave Gas Sensor with Temperature Compensation by Itself
- Evaluation of Closed Cracks by Model Analysis of Subharmonic Ultrasound
- Observation of Surface Acoustic Wave Propagation on a Quartz Ball with Concave Proximate Electrodes
- Measurement of Surface Acoustic Wave on a Quartz Ball with Proximate Electrodes to Improve Performance of Ball Surface Acoustic Wave Device
- Development of High Precision Metal Micro-Electro-Mechanical-Systems Column for Portable Surface Acoustic Wave Gas Chromatograph (Special Issue : Ultrasonic Electronics)
- Continuous Measurement of Multiple Gases Using Ball Surface Acoustic Wave Gas Chromatograph (Special Issue : Ultrasonic Electronics)
- Enhancement of Selectivity in Nonlinear Ultrasonic Imaging of Closed Cracks Using Amplitude Difference Phased Array
- Evaluation of Closed Stress Corrosion Cracks in Ni-Based Alloy Weld Metal Using Subharmonic Phased Array
- Generation and Detection of 400-MHz-Band Surface Acoustic Waves Using the Phase Velocity Scanning Method
- Evaluation of Domain Boundary of Piezo/Ferroelectric Material by Ultrasonic Atomic Force Microscopy
- Evaluation on Micro Cracks in Ceramic Bearing Balls by Using the Floating Resonance of Surface Acoustic Waves
- Ultrasonic Evaluation of Closed Cracks Using Subharmonic Phased Array
- Temperature Compensation for Ball Surface Acoustic Wave Devices and Sensor Using Frequency Dispersion
- Ultrasonic Atomic Force Microscopy of Domain Structure in Lead Magnesium Niobate–Lead Titanate Single Crystal Using a Surface Electrode Pair
- Simulation and Analysis of Subharmonics and Tail Effect for Ultrasonic Nondestructive Evaluation of Closed Cracks
- Ultrasonic Measurement of Closed Stress Corrosion Crack Depth Using Subharmonic Phased Array
- Improvement of Closed Crack Selectivity in Nonlinear Ultrasonic Imaging Using Fundamental Wave Amplitude Difference
- Analysis of Ball Surface Acoustic Wave Sensor Response to Wide Variety of Gases Using Gas Chromatography
- Observation of the Roundtrips of Surface Acoustic Waves on a Single Crystal LiNbO3 Ball
- Development of Microseparation Column for Ball Surface Acoustic Wave Gas Chromatograph
- Erratum: "Ultrasonic Evaluation of Closed Cracks Using Subharmonic Phased Array"
- Improvement of Closed Crack Selectivity in Nonlinear Ultrasonic Imaging Using Fundamental Wave Amplitude Difference (Special Issue : Ultrasonic Electronics) -- (Measurement techniques, imaging, nondestructive evaluation)
- Simulation of Compositional Variation in Liquid Phase Epitaxy InGaP Using a Two Dimensional Model
- Simulation of Compositional Variation in Liquid Phase Epitaxy InGaP Using a Two Dimensional Model
- Evaluation of Functional Materials and Devices Using Atomic Force Microscopy with Ultrasonic Measurements
- Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method