Electrostatically Levitated Ball MEMS
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概要
- 論文の詳細を見る
- 2001-09-25
著者
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ESASHI Masayoshi
Tohoku University Graduate School of Engineering
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Esashi Masayoshi
Tohoku University
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MURAKOSHI Takao
TOKIMEC INC
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Esashi Masayoshi
Tohoku University New Industry Creation Hatchery Center
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Toda Risaku
Ball Semiconductor Inc.
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Murakoshi Takao
Tokimec Inc. Mrd Center
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TAKEDA Nobuo
Ball Semiconductor Inc.
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NAKAMURA Shigeru
Tokimec Inc., MRD Center
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Nakamura Shigeru
Tokimec Inc. Mrd Center
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