Magnetically actuated cantilever with small resonator for scanning probe microscopy
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概要
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We have demonstrated the fabrication and operation of the RICA for application of SPM. The torsional resonator for electromagnetic excitation and detection is successfully fabricated using EB lithography and micromachining technology. The fabricated torsional resonator in a vacuum has the resonance frequency of 3.4MHz and the cantilever is successfully deflected by electromagnetic force in vertical direction. By using DC non-contact mode, deposited charges were observed by the electrostatic force between silicon surface and conductive tip. The fabricated RICA with a high resonance frequency is expected to have extremely potential capability for a quick response and a high speed SPM operation.
- 社団法人 電気学会の論文
- 2001-03-01
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