Subwavelength Pattern Transfer by Near-Field Photolithography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
-
ESASHI Masayoshi
Tohoku University Graduate School of Engineering
-
ONO Takahito
Tohoku University
-
Esashi Masayoshi
Tohoku University
-
Ono Takahito
Tohoku University Faculty Of Engineering
-
Esashi Masayoshi
Tohoku University Faculty Of Engineering
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