Debris from the Target of an X-Ray Laser System and the Effect on Cavity Mirrors

概要

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The spatial distributions of debris generated from an X-ray laser system are measured in the directions of the cavity mirrors set orthogonal to the target surface both in the horizontal and vertical directions. The thickness of the vaporized particles deposited increases in the horizontal direction and decreases in the vertical direction with distance from the origin, the intersection of the mirror plane and a line drawn from the center of the irradiated area along the longer side. The number of droplets deposited also shows similar trends. Upon analyzing the spatial distributions of the debris, as an appropriate measure for preventing debris, a combination of sidewalls and pinhole cells were installed between the edge of the tape target and the cavity mirrors. The sidewalls stopped all the droplets from reaching the mirror surfaces but had only a small effect on the vaporized particles. The vaporized particles were however reduced substantially when installing pinhole cells with the diameter of the pinhole corresponding to the lasing region. Using the combination of sidewalls and pinhole cells, the lifetime of the cavity mirrors was prolonged by about 40-fold. This demonstrates that a reasonable cycle operation of the X-ray laser system can be realized by using the sidewalls and pinhole cells.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2003-03-15