Improvement of Compact Electron-Beam-Excited Plasma Source for Increased Producible Plasma Density
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概要
- 論文の詳細を見る
Multiple modifications of graphite electrodes of a compact electron-beam-excited plasma (EBEP) source to enhance the cooling efficiency of the electrodes resulted in an increase in the maximum value of producible EBEP density. In addition, experiments on surface nitriding of steel samples in nitrogen EBEP demonstrated that the improved compact EBEP source with modified electrodes outperforms one with conventional electrodes, thereby demonstrating the significant advantage of using the improved source for a wide range of industrial and scientific applications.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-07-25
著者
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Hara Tamio
Toyota Technological Inst. Nagoya Jpn
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Ichiki Ryuta
Toyota Technological Institute, 2-12-1 Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
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