High Degree of Dissociation of Nitrogen Molecules in Large-Volume Electron-Beam-Excited Plasma
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概要
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The degree of dissociation of nitrogen is measured in a large-volume N_2-Ar mixture plasma generated by an electron-beam-excited plasma device. The device features independent control of the beam current and energy. In setting the beam current and energy at 3.4 A and 140 V, the degree of dissociation of nitrogen was 0.16. The high degree of dissociation is attributed to the characteristics of the system in which the degree depends on the beam energy fed into the plasma and not the size of the chamber, as it is in conventional plasma sources. In view of the device characteristics, high-density atomic nitrogen can be obtained with electron-beam-excited plasma in a large-volume device.
- 社団法人応用物理学会の論文
- 2000-10-01
著者
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Hara Tamio
Toyota Technological Inst. Nagoya Jpn
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Hara T
Toyota Technological Institute
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Abraha Petros
Faculty Of Science And Technology Meijo University
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Sugimoto Masaya
Faculty Of Systems Science And Technology Akita Prefectural University
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Hamagaki Manabu
The Institute Of Physical And Chemical Research
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KOBAYASHI Toshihiro
Toyota Technological Institute, Department of Information-aided Technology
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TANIGUCHI Kazunari
Toyota Technological Institute
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MASUKO Shingo
Toyota Technological Institute
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Kobayashi Toshihiro
Toyota Technological Institute
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Sugimoto Masaya
Faculty of Systems Science and Technology, Akita Prefectural University
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