Nanoprocessing of Diamond Using a Variable Pressure Scanning Electron Microscope
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概要
- 論文の詳細を見る
We demonstrated diamond processing using a variable pressure scanning electron microscope. Dents were formed in diamond by electron beam irradiation in air, nitrogen gas, oxygen gas, and water vapor. The processing in oxygen atmosphere showed the highest efficiency. The processing mechanism can be explained in terms of gas ion sputtering and chemical reaction. We used this method to remove residue on a diamond device, which showed that it is practical for fabricating diamond-based nano-devices.
- Japan Society of Applied Physicsの論文
- 2006-01-25
著者
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Yuan Xiao-li
Nanomaterials Laboratory National Institute For Materials Science
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Sekiguchi Takashi
Nanomaterials Laboratory National Institute For Materials Science
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Niitsuma Jun-ichi
Nanomaterials Laboratory National Institute For Materials Science
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Koizumi Satoshi
Advanced Materials Laboratory National Institute For Materials Science
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Yuan Xiao-li
Nanomaterials Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
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Sekiguchi Takashi
Nanomaterials Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
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Koizumi Satoshi
Advanced Materials Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
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Niitsuma Jun-ichi
Nanomaterials Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
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