X-Ray photoelectron Spectroscopic Observation on the Formation of Carbon Nitride Thin Films Produced by Low-Energy Nitrogen Ion Implantation
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概要
- 論文の詳細を見る
- 2000-07-30
著者
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BABA Yuji
Japan Atomic Energy Research Institute
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SEKIGUCHI Tetsuhiro
Japan Atomic Energy Agency
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Baba Yuji
Japan Atomic Energy Agency
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Baba Y
Japan Atomic Energy Res. Inst. Ibaraki Jpn
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Sekiguchi Takashi
Department Of Physics Faculty Of Science Tohoku University:the Research Institute For Iron Steel And
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SHIMOYAMA Iwao
Japan Atomic Energy Agency
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Sekiguchi Takashi
Nanomaterials Laboratory National Institute For Materials Science
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