Atomic arrangement, composition and orientation of hexagonal BCN films synthesized by radiofrequency plasma enhanced CVD

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概要

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• Oriented hexagonal BCN films were synthesized on Si (1 0 0) substrate by radiofrequency plasma enhanced chemical vapor deposition using tris-(dimethylamino)borane as a precursor. The formation of the crystalline hexagonal BCN hybrids was confirmed by FT-IR and XRD. CH4 + H2 carrier gas increased the C content in the films in comparison with N2 carrier gas. XPS measurement showed that the films were composed of a variety of B-N, B-C, C-N bonds to form the BCN atomic hybrids. The π* resonance peak in the B K-edge NEXAFS spectra also indicated the presence of the sp2 hybrid configuration of B-C-N bonds like BN3 in h-BN. The σ* resonance peaks suggested the diversity in the σ bonds in the films. Orientation of the h-BCN hybrids was suggested on the basis of the polarization dependence of NEXAFS.

• 2009-04-01

著者

• MANNAN Md.

  Department of Applied Chemistry, Faculty of Science and Engineering, Saga University

• NAGANO Masamitsu

  Department of Applied Chemistry, Faculty of Science and Engineering, Saga University

• HIRAO Norie

  Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency

• BABA Yuji

  Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency

• KIDA Tetsuya

  Department of Chemistry and Applied Chemistry, Faculty of Science and Engineering, Saga University

• NOGUCHI Hideyuki

  Department of Chemistry and Applied Chemistry, Faculty of Science and Engineering, Saga University

• SHIMOYAMA Iwao

  Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency

• Nagano Masamitsu

  Department Of Chemistry And Applied Chemistry Faculty Of Science And Engineering Saga University

• Nagano Masamitsu

  Department Of Applied Chemistry Faculty Of Science And Engineering Saga University

• Mannan Md.

  Department Of Chemistry And Applied Chemistry Faculty Of Science And Engineering Saga University

• Mannan Md.

  Department Of Applied Chemistry Faculty Of Science And Engineering Saga University

• Hirao Norie

  Synchrotron Radiation Research Unit Quantum Beam Science Directorate Japan Atomic Energy Agency

• Hirao Norie

  Japan Atomic Energy Research Institute

• Hirao Norie

  Synchrotron Radiation Res. Unit Quantum Beam Sci. Directorate Japan Atomic Energy Agency

• Kida Tetsuya

  Department Of Chemistry And Applied Chemistry Faculty Of Science And Engineering Saga University

• Baba Y

  Japan Atomic Energy Res. Inst. Ibaraki Jpn

• Baba Yuji

  Synchrotron Radiation Research Unit Quantum Beam Science Directorate Japan Atomic Energy Agency

• Noguchi Hideyuki

  Department Of Applied Chemistry Saga University

• Noguchi Hideyuki

  Department Of Chemistry And Applied Chemistry Faculty Of Science And Engineering Saga University

• Baba Yuji

  Synchrotron Radiation Center Japan Atomic Energy Research Institute

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