セグメント構造ダイヤモンド状炭素膜を摩擦駆動面に用いた弾性表面波リニアモータ (第2報) : —セグメント構造クロム/ダイヤモンド状炭素膜の導入—

概要

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Surface acoustic wave (SAW) linear motor is a kind of ultrasonic motors. The advantages of the SAW linear motor are thin structure, high force, high speed and precise positioning. On the other hand, the motor has a problem with wear of contact surface. The SAW linear motor consists of a LiNbO3 substrate as a stator transducer and a silicon substrate with distributed projections as a slider. However, the stator transducer material is easy to wear out due to friction drive. Moreover the silicon projections may enhance the wearing. Lifetime of the motor is reduced by the wear of the stator. To solve this problem, previously, segment-structured diamond-like carbon (S-DLC) films have been applied to the stator transducer surface. However, reduction of driving performance with S-DLC films stator was observed. Nonuniform shapes and heights of the segments are considered as the reason. Additionally, exfoliations of the S-DLC films were observed. The reason of this problem was that interlayer between the S-DLC films and LiNbO3 substrate was not optimized. In this report, we propose a new S-DLC transducer. This paper presents the new method, fabrication of the stator transducer and abrasion test result. Driving characteristic with the stator is also reported.