熱フィラメントCVD法による平板状ダイヤモンドの合成

概要

論文の詳細を見る
Flattened diamond crystals can be synthesized on polycrystal gold plate by hot-filament chemical vapor deposition (HFCVD) at atmospheric pressure. The ratio of the size of the top face and the height is 20 : 1 or more. Spraying the reaction gas onto the substrate is effective for synthesis of flattened diamond crystal. By spraying the reaction gas onto the substrate, sub-micron crystals on the substrate migrate. Then, they collide with each other, and twins are formed. The preferential growth of the side face that has the re-entrant corner occurs. Finally, flattened diamond crystals are formed. Moreover, the quality of all the diamond crystals including flattened diamonds can be improved by spraying the reaction gas. The probability of synthesis of flattened diamond crystal is 50% on HFCVD when spraying the reaction gas at 13 kPa.
社団法人表面技術協会の論文
2003-01-01