1112 オンライン部分空間モデル同定アクティブ制振制御(OS6-(1)オーガナイズドセッション《振動・音響・制御》)

概要

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Vibration suppression control considering elastic part deformation is one of the indispensable issues in the precision engineering field and a high-density LSI circuit processing. This study aims at suppressing the induced vibration at rapid positioning operation. This control method consists of reduced order model identification and Predictive Repeated control using the anti-phase pitch driving based on an estimated behavior of the identified model. This method improves the positioning performance limit generated by conventional PI feedback control with existing actuator, which has low dynamic characteristics with time lag. This study is to bring model identification in the online process and inspected the necessity of the online model.
一般社団法人日本機械学会の論文
2010-08-27