M1-2 ナノ粉末を用いたナノインプリント犠牲樹脂型インサート粉末射出成形によるマイクロ構造体の作製(M1 製作技術,材料)

概要

論文の詳細を見る
This study aims to develop the manufacturing method of micro-structured parts by the metal powder injection molding (MIM) inserted micro-sacrificial plastic molds which were prepared by nano-imprint lithography (NIL) technique. In this process named NIL/μ-SPiMIM, the feedstock composed of nanoscale copper powder and polyacetal-based binder was adequately prepared and molded into polymethylmethacrylate films with fine line-scan structures, and it was sintered in a reductive gas atmosphere followed by solvent debinding of the films. The filling rate of feedstock into micro-channels and transcriptional property in sintered parts was evaluated by SEM observation. The experimental results revealed reasonable evidences that using nanoscale powder could sinter at lower temperature but was not easily full-filled the feedstock into narrow cavity molds. It can be concluded that the manufacturing method named NIL/μ-SPiMIM proposed in this study has great potential to produce precisely 3 dimensional complex metallic parts with the micro-structures.
一般社団法人日本機械学会の論文
2009-10-15