S041022 犠牲樹脂型インサート金属粉末射出成形によるインプリント用スタンパーの開発([S04102]粉末成形とその評価(2))

概要

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This study aims to develop the manufacturing method of metallic stamper for imprinting with micro structures by metal powder injection molding (MIM). The mold used was prepared by imprinting plastic sheet. In the micro-sacrificial plastic mold insert MIM named as p-SPiMIM process, the feedstock composed of Ni (D50=0.74pm) powder and polyacetal-based binder was filled into polymethylmethacrylate mold with line and space patterns from 47gm wide, 150pm high to 6p.m wide, 19pm high, and it was debinded and sintered in H2 and Ar gas atmosphere. The filling state of feedstock into micro-channels and transcriptional property in sintered parts was evaluated by cross-sectional SEM observation. The experimental results revealed reasonable evidences using submicron Ni powder could sinter at low temperature and accomplished high transcription in narrow cavity mold. It can be concluded that the p-SPiMIM process has potential to mass-produce the stamper for imprinting made of versatile highly-durable metals.
2011-09-11