レジスト薄膜インサート金属粉末射出成形によるマイクロ構造体の作製と粉末粒径の影響

概要

論文の詳細を見る
The manufacturing method of resist film insert metal powder injection molding (MIM) namely Resist/μ-SpiMIM process has been proposed. The resist film made of PMMA polymer with numerous micro-holes was used as micro sacrificial plastic mold (SP-mold). A novel molding machine which could achieve to mold without pelletizing was also used to produce the green compacts with a high efficiency in experiment by using a small amount of feedstock. The feedstock prepared by pure copper powders with various particle sizes was injection-molded into the SP-mold and the sintered parts with micro-pillar structure were produced after debinding and sintering process. The effects of particle size on density, shape-transcription and surface roughness of those sintered parts were discussed. The decreasing of particle size results in a marked improvements of surface roughness, transcription and dimensional variation of sintered parts.
2010-01-25