ナノ銅粉末を用いたNIL犠牲樹脂型インサートMIMによるマイクロ構造体の作製

概要

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This study aims to develop the manufacturing method of micro-structured parts by the metal powder injection molding (MIM) inserted micro-sacrificial plastic molds which were prepared by nano-imprint lithography (NIL) technique. In this process named NIL/μ-SPiMIM, the feedstock composed of nano-sized copper powder and polyacetal-based binder was adequately prepared and molded into polymethylmethacrylate films with fine line-scan structures, and the molded parts were sintered in a reductive gas atmosphere followed by solvent debinding of the films. The behavior in debinding and sintering was investigated by thermo-gravimetric analysis, carbon and oxygen analysis and SEM observation. The effects of sintering temperature on sintered density, shrinkage, and profile accuracy were evaluated systematically. It can be concluded that the manufacturing method named NIL/μ-SPiMIM proposed in this study has great potential to produce precisely 3 dimensional complex metallic parts with fine micro-structures.