LIGA犠牲樹脂型インサート金属粉末射出成形によるマイクロ構造体の製造

概要

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The manufacturing method of micro sacrificial plastic mold (SP-mold) insert metal injection molding (MIM) combined LIGA process, namely LIGA/μ-SPiMIM process has been proposed to solve specific problems involving the miniaturization of MIM. Two types of SP-molds with fine structures were used: 1) PMMA resist, 2) PMMA mold injected into Ni-electroform, which is a typical LIGA process. Stainless steel 316L feedstock was injection-molded into the SP-molds with multi-pillar structures. To reduce the defects in plastic injection molding such as weld-line and short filling, which were developed around micro pillar structures of molded parts, the molding conditions for producing the SP-molds were optimized. This study also focused on the effects of metal particle size and processing conditions on the shrinkage, transcription and surface roughness of sintered parts.
2009-12-25